Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology

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Metadaten
Author:Wolfgang Kronast, Ulrich MeschederGND, Bernhard Müller, Rolf Huster
DOI:https://doi.org/10.1117/12.2001229
ISBN:978-0-819-49385-9
Parent Title (English):Proceedings of SPIE: Volume 8616; SPIE MOEMS-MEMS, 2-7 Februar 2013, San Francisco, California, United States
Document Type:Conference Proceeding
Language:English
Year of Completion:2013
Release Date:2018/01/25
Access Rights:Frei verfügbar
Licence (German):License LogoEs gilt das UrhG