Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology
| Author: | Wolfgang Kronast, Ulrich MeschederORCiDGND, Bernhard Müller, Rolf Huster |
|---|---|
| DOI: | https://doi.org/10.1117/12.2001229 |
| ISSN: | 0277-786X |
| Parent Title (English): | Proceedings of SPIE: Volume 8616; MOEMS and Miniaturized Systems XII, 2-6 Februar 2013, San Francisco, California, United States |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2013 |
| Release Date: | 2018/01/25 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |