TY - CPAPER U1 - Konferenzveröffentlichung A1 - Kronast, Wolfgang A1 - Mescheder, Ulrich A1 - Müller, Bernhard A1 - Huster, Rolf T1 - Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology T2 - Proceedings of SPIE: Volume 8616; MOEMS and Miniaturized Systems XII, 2-6 Februar 2013, San Francisco, California, United States Y1 - 2013 SN - 0277-786X SS - 0277-786X U6 - https://doi.org/10.1117/12.2001229 DO - https://doi.org/10.1117/12.2001229 ER -