@inproceedings{KronastMeschederM{\"u}lleretal.2013,
  author    = {Kronast, Wolfgang and Mescheder, Ulrich and M{\"u}ller, Bernhard and Huster, Rolf},
  title     = {Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology},
  booktitle = {Proceedings of SPIE: Volume 8616; MOEMS and Miniaturized Systems XII, 2-6 Februar 2013, San Francisco, California, United States},
  issn      = {0277-786X},
  doi       = {10.1117/12.2001229},
  year      = {2013},
  language  = {en}
}