3D structuring of c-Si using porous silicon as sacrificial material
| Author: | Ulrich MeschederORCiDGND, Andras KovacsORCiDGND, A. Fahad, Rolf Huster |
|---|---|
| DOI: | https://doi.org/10.1109/NANO.2002.1032117 |
| ISBN: | 0-7803-7538-6 |
| Parent Title (English): | Proceedings of the 2002 2nd IEEE Conference on Nanotechnology: IEEE-NAN0 2002; August 26-28, Washington D.C. |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2002 |
| Release Date: | 2018/02/23 |
| First Page: | 33 |
| Last Page: | 36 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |