@inproceedings{MeschederKovacsFahadetal.2002, author = {Mescheder, Ulrich and Kovacs, Andras and Fahad, A. and Huster, Rolf}, title = {3D structuring of c-Si using porous silicon as sacrificial material}, booktitle = {Proceedings of the 2002 2nd IEEE Conference on Nanotechnology: IEEE-NAN0 2002; August 26-28, Washington D.C.}, isbn = {0-7803-7538-6}, doi = {10.1109/NANO.2002.1032117}, pages = {33 -- 36}, year = {2002}, language = {en} }