An integrated approach for validating micro mechanical systems based on simulation and test
| Author: | Albert Albers, Tobias Deigendesch, Hans-Georg EnklerORCiDGND, Stefan Hauser, Pablo Leslabay, Jochen Oerding |
|---|---|
| DOI: | https://doi.org/10.1007/s00542-008-0615-2 |
| ISSN: | 1432-1858 |
| Parent Title (English): | Microsystem Technologies |
| Document Type: | Article (peer-reviewed) |
| Language: | English |
| Year of Completion: | 2008 |
| Release Date: | 2017/06/20 |
| Volume: | 14.2008 |
| Issue: | 12 |
| First Page: | 1781 |
| Last Page: | 1787 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |