An integrated approach for validating micro mechanical systems based on simulation and test

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Author:Albert Albers, Tobias Deigendesch, Hans-Georg EnklerORCiDGND, Stefan Hauser, Pablo Leslabay, Jochen Oerding
DOI:https://doi.org/10.1007/s00542-008-0615-2
ISSN:1432-1858
Parent Title (English):Microsystem Technologies
Document Type:Article (peer-reviewed)
Language:English
Year of Completion:2008
Release Date:2017/06/20
Volume:14.2008
Issue:12
First Page:1781
Last Page:1787
Access Rights:Frei verf├╝gbar
Licence (German):License LogoEs gilt das UrhG