TY - JOUR U1 - Wissenschaftlicher Artikel A1 - Albers, Albert A1 - Deigendesch, Tobias A1 - Enkler, Hans-Georg A1 - Hauser, Stefan A1 - Leslabay, Pablo A1 - Oerding, Jochen T1 - An integrated approach for validating micro mechanical systems based on simulation and test JF - Microsystem Technologies Y1 - 2008 SN - 1432-1858 SS - 1432-1858 U6 - https://doi.org/10.1007/s00542-008-0615-2 DO - https://doi.org/10.1007/s00542-008-0615-2 VL - 14.2008 IS - 12 SP - 1781 EP - 1787 ER -