@article{AlbersDeigendeschEnkleretal.2008, author = {Albert Albers and Tobias Deigendesch and Hans-Georg Enkler and Stefan Hauser and Pablo Leslabay and Jochen Oerding}, title = {An integrated approach for validating micro mechanical systems based on simulation and test}, series = {Microsystem Technologies}, volume = {14.2008}, number = {12}, issn = {1432-1858}, doi = {10.1007/s00542-008-0615-2}, pages = {1781 -- 1787}, year = {2008}, language = {en} }