MOEMS focusing device with ideal parabolic deflection shape
Author: | Ulrich MeschederORCiDGND, Carlos Estan, Gergoe Somogyi, Markus Freudenreich |
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DOI: | https://doi.org/10.1109/SENSOR.2005.1496624 |
ISBN: | 0-7803-8994-8 |
Parent Title (English): | Transducers '05 : Seoul, Korea, The 13th International Conference on Solid-State Sensors, Actuators and Microsystems; Digest of Technical Papers |
Document Type: | Conference Proceeding |
Language: | English |
Year of Completion: | 2005 |
Release Date: | 2018/02/22 |
Tag: | Electrostatic focusing device; FEM simulation; MOEMS; SOI |
Page Number: | 5 |
First Page: | 1000 |
Last Page: | 1005 |
Licence (German): | ![]() |