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Author
Estan, Carlos
(4)
Freudenreich, Markus
(4)
Mescheder, Ulrich
(4)
Somogyi, Gergoe
(4)
Török, Zoltan
(1)
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2005
(3)
2006
(1)
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German
(2)
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FEM simulation
(2)
MOEMS
(2)
SOI
(2)
Electrostatic focusing device
(1)
Electrostatic focusing device
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Distortion optimized focusing mirror device with large aperture
(2006)
Mescheder, Ulrich
;
Estan, Carlos
;
Somogyi, Gergoe
;
Freudenreich, Markus
Mikrotechnisch hergestellter Membranspiegel für aktive Fokussierung
(2005)
Mescheder, Ulrich
;
Somogyi, Gergoe
;
Freudenreich, Markus
;
Estan, Carlos
MOEMS focusing device with ideal parabolic deflection shape
(2005)
Mescheder, Ulrich
;
Estan, Carlos
;
Somogyi, Gergoe
;
Freudenreich, Markus
Mikrosystemtechnik: Mikrotechnische hergestelltes aktiv-optisches System für Fokussieraufgaben
(2005)
Mescheder, Ulrich
;
Somogyi, Gergoe
;
Freudenreich, Markus
;
Estan, Carlos
;
Török, Zoltan
1
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4