Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems
| Document Type: | Article (peer-reviewed) |
|---|---|
| Author: | Ulrich MeschederORCiDGND, Bernhard Müller, Safi Baborie, P. Urbanovic |
| DOI: | https://doi.org/10.1088/0960-1317/19/9/094003 |
| ISSN: | 1361-6439 |
| Parent Title (English): | Journal of Micromechanics and Microengineering |
| Language: | English |
| Year of Completion: | 2009 |
| Release Date: | 2018/02/01 |
| Volume: | 19.2009 |
| Issue: | 9 |
| Page Number: | 6 |
| Open-Access-Status: | Closed Access |
| Licence (German): |  Urheberrechtlich geschützt |