@article{MeschederMuellerBaborieetal.2009, author = {Ulrich Mescheder and Bernhard M{\"u}ller and Safi Baborie and P. Urbanovic}, title = {Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems}, series = {Journal of Micromechanics and Microengineering}, volume = {19.2009}, number = {9}, issn = {1361-6439}, doi = {10.1088/0960-1317/19/9/094003}, year = {2009}, language = {en} }