Primary Current Distribution Model for Electrochemical Etching of Silicon Through a Circular Opening
| Author: | Alexey Ivanov, Ulrich MeschederORCiDGND |
|---|---|
| URL: | https://www.comsol.com/paper/download/288181/ivanov_paper.pdf |
| ISBN: | 978-0-9910001-2-8 |
| Parent Title (English): | Proceedings of the 2015 COMSOL Conference, Grenoble |
| Document Type: | Conference Proceeding |
| Language: | English |
| Year of Completion: | 2015 |
| Release Date: | 2017/01/12 |
| Tag: | Anodization; Electrochemical etching; Etch front movement; Silicon; Structuring |
| Page Number: | 7 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Urheberrechtlich geschützt |