@inproceedings{IvanovMescheder2015,
  author    = {Alexey Ivanov and Ulrich Mescheder},
  title     = {Primary Current Distribution Model for Electrochemical Etching of Silicon Through a Circular Opening},
  series = {Proceedings of the 2015 COMSOL Conference, Grenoble},
  isbn      = {978-0-9910001-2-8},
  year      = {2015},
  language  = {en}
}