@inproceedings{IvanovMescheder2015,
  author    = {Ivanov, Alexey and Mescheder, Ulrich},
  title     = {Primary Current Distribution Model for Electrochemical Etching of Silicon Through a Circular Opening},
  booktitle = {Proceedings of the 2015 COMSOL Conference, Grenoble},
  isbn      = {978-0-9910001-2-8},
  url       = {https://www.comsol.com/paper/download/288181/ivanov_paper.pdf},
  pages     = {7},
  year      = {2015},
  language  = {en}
}