TY  - CPAPER
U1  - Konferenzveröffentlichung
A1  - Ivanov, Alexey
A1  - Mescheder, Ulrich
T1  - Primary Current Distribution Model for Electrochemical Etching of Silicon Through a Circular Opening
T2  - Proceedings of the 2015 COMSOL Conference, Grenoble
KW  - Electrochemical etching
KW  - Anodization
KW  - Silicon
KW  - Structuring
KW  - Etch front movement
Y1  - 2015
UR  - https://www.comsol.com/paper/download/288181/ivanov_paper.pdf
SN  - 978-0-9910001-2-8
SB  - 978-0-9910001-2-8
SP  - 7
S1  - 7
ER  -