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Ablation characteristics of picosecond laser single point drilling of Si3N4 under dry and water medium

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Metadaten
Author:Esmaeil G. Zahrani, Bahman AzarhoushangORCiDGND, Jürgen Wilde, Ali ZahediORCiD
DOI:https://doi.org/10.1016/j.procir.2020.04.144
ISSN:2212-8271
Parent Title (English):Procedia CIRP
Document Type:Conference Proceeding
Language:English
Year of Completion:2020
Release Date:2022/03/28
Tag:Ablation depth; Laser focus point; Picosecond laser single point ablation; Si3N4; Under-water laser-machining
Volume:95.2020
First Page:938
Last Page:943
Open Access :Frei verfügbar
Licence (German):License LogoCreative Commons - CC BY-NC-ND - Namensnennung - Nicht kommerziell - Keine Bearbeitungen 4.0 International