Ablation characteristics of picosecond laser single point drilling of Si3N4 under dry and water medium
| Document Type: | Conference Proceeding |
|---|---|
| Author: | Esmaeil Ghadiri Zahrani, Bahman AzarhoushangORCiDGND, Jürgen Wilde, Ali ZahediORCiDGND |
| DOI: | https://doi.org/10.1016/j.procir.2020.04.144 |
| ISSN: | 2212-8271 |
| Parent Title (English): | Procedia CIRP |
| Subtitle (English): | 20th CIRP Conference on Electro Physical and Chemical Machining (ISEM 2021), 19 - 21 January 2021, Zurich, Switzerland |
| Language: | English |
| Year of Completion: | 2020 |
| Release Date: | 2022/03/28 |
| Tag: | Ablation depth; Laser focus point; Picosecond laser single point ablation; Si3N4; Under-water laser-machining |
| Volume: | 95.2020 |
| First Page: | 938 |
| Last Page: | 943 |
| Open-Access-Status: | Open Access |
| Licence (German): |  Creative Commons - CC BY-NC-ND - Namensnennung - Nicht kommerziell - Keine Bearbeitungen 4.0 International |