TY  - CHAP
U1  - Konferenzveröffentlichung
A1  - Ghadiri Zahrani, Esmaeil
A1  - Azarhoushang, Bahman
A1  - Wilde, Jürgen
A1  - Zahedi, Ali
T1  - Ablation characteristics of picosecond laser single point drilling of Si3N4 under dry and water medium
T2  - Procedia CIRP
KW  - Under-water laser-machining
KW  - Picosecond laser single point ablation
KW  - Si3N4
KW  - Ablation depth
KW  - Laser focus point
Y1  - 2020
SN  - 2212-8271
SS  - 2212-8271
U6  - https://doi.org/10.1016/j.procir.2020.04.144
DO  - https://doi.org/10.1016/j.procir.2020.04.144
VL  - 95.2020
SP  - 938
EP  - 943
ER  -