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Author
Mescheder, Ulrich (2)
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Year of publication
2002 (2)
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Article (peer-reviewed)
(1)
Conference Proceeding
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English
(2)
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Keywords
Eutectic bonding
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Laser micromachining
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Wafer bonding
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3D structuring of c-Si using porous silicon as sacrificial material
(2002)
Mescheder, Ulrich
;
Kovacs, Andras
;
Fahad, A.
;
Huster, Rolf
Local laser bonding for low temperature budget
(2002)
Mescheder, Ulrich
;
Alavi, M.
;
Hiltmann, K.
;
Lietzau, Ch.
;
Nachtigall, Christoph
;
Sandmaier, H.
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