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Author
Mescheder, Ulrich
(3)
Mackens, U.
(2)
Bruns, A.
(1)
Dammel, R.
(1)
Harms, H.
(1)
Hass, Volker C.
(1)
Köhler, I.
(1)
Lifka, H.
(1)
Lüthje, H.
(1)
Munack, Axel
(1)
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Year of publication
1990 (4)
(remove)
Document type
Article (peer-reviewed)
(3)
Conference Proceeding
(1)
Language
English
(4)
Has full text
No
(4)
Is part of the Bibliography
Yes
(4)
Keywords
Biomass
(1)
Design for experiments
(1)
Kinetic theory
(1)
Sugar
(1)
Tellurium
(1)
4
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Year
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Title
Title
Author
Author
Experimental Design of Fermentations for Model Identification
(1990)
Hass, Volker C.
;
Munack, Axel
Influence of X-ray mask repair on pattern placement accuracy
(1990)
Schaffer, H.
;
Mescheder, Ulrich
;
Weigmann, U.
;
Petzold, H.-C.
X-ray mask technology: Precise etching of sub-half-micron tungsten absorber features
(1990)
Lüthje, H.
;
Bruns, A.
;
Harms, H.
;
Köhler, I.
;
Mescheder, Ulrich
;
Mackens, U.
;
Stuck, T.
Application of positive and negative tone x-ray resist for 0.5μm CMOS device fabrication
(1990)
Mescheder, Ulrich
;
Mackens, U.
;
Lifka, H.
;
Dammel, R.
;
Pawloski, G.
;
Theis, J.
1
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4