Closed Access
Refine
Year of publication
Document type
- Article (peer-reviewed) (31) (remove)
Has full text
- No (31)
Is part of the Bibliography
- Yes (31)
Keywords
- Porous silicon (4)
- Silicon (2)
- 3D transformation (1)
- Adhesion (1)
- Adhesion and diffusion barrier (1)
- Adsorption (1)
- Bird’s beak (1)
- Capillary condensation (1)
- Capillary forces (1)
- Convex and concave corner rounding (1)