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Real time In-Situ Quality Monitoring of Grinding Process using Microtechnology based Sensor Fusion
(2020)
Realization and mechanical investigation of perforated and porous membranes for filter applications
(2006)
Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters
(2002)
Skalierbare Verbindungstechnik mittels anpassbarer nanoskaliger Verbindungsstrukturen (NanoBond)
(2009)
Steuerung der Peaklage und der Sensitivität von siliziumbasierten porösen optischen Multischichten
(2013)