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Mescheder, Ulrich
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Müller, Bernhard
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Porous silicon
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Adhesion and diffusion barrier
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Charge decay
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Porous silicon-based humidity sensor with interdigital electrodes and internal heaters
(2003)
Fürjes, P.
;
Kovacs, Andras
;
Dücsö, Cs.
;
Adam, Maria
;
Müller, Bernhard
;
Mescheder, Ulrich
Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems
(2009)
Mescheder, Ulrich
;
Müller, Bernhard
;
Baborie, Safi
;
Urbanovic, P.
Sensor system for air quality measurement
(2007)
Kovacs, Andras
;
Müller, Bernhard
;
Kritwattanakhorn, Jutaphorn
;
Mescheder, Ulrich
;
Peter, Andreas
;
Ament, Christoph
;
Wöllenstein, Jürgen
;
Bauersfeld, Marie-Luise
;
Rademacher, Sven
Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters
(2002)
Mescheder, Ulrich
;
Kovacs, Andras
;
Müller, Bernhard
Simulation, Fabrication and Characterization of Robust Vibrational Energy Harvester
(2015)
Chauhan, Surjitsinh
;
Müller, Bernhard
;
Mescheder, Ulrich
11
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15