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Author
Dücsö, Cs. (2)
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2001
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2003
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Article (peer-reviewed)
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English
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Porous silicon
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Effective heating
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Humidity sensor
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MEMS
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Micromachining
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Microsystems
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Porous silicon as multifunctional material in MEMS
(2001)
Mescheder, Ulrich
;
Kovacs, Andras
;
Kronast, Wolfgang
;
Barsony, Istvan
;
Adam, Maria
;
Dücsö, Cs.
Porous silicon-based humidity sensor with interdigital electrodes and internal heaters
(2003)
Fürjes, P.
;
Kovacs, Andras
;
Dücsö, Cs.
;
Adam, Maria
;
Müller, Bernhard
;
Mescheder, Ulrich
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