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Author
Higelin, Gerald (2)
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Year of publication
1998
(1)
2002
(1)
Document type
Report
(2)
Language
German
(1)
English
(1)
Has full text
No
(2)
Is part of the Bibliography
Yes
(2)
Keywords
Membranes
(1)
Silicon
(1)
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Title
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Author
Mikrotechnologie: Simulation und Analyse von ESD-Vorgängen an mikroelektronischen Schaltungen
(2002)
Higelin, Gerald
;
Lange, Volker
Static and dynamic characterization of SI membranes
(1998)
Lange, Volker
;
Higelin, Gerald
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2