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Author
Huber, H.-L.
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Mescheder, Ulrich
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Mund, F.
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Year of publication
1987 (1)
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Article (peer-reviewed) (1)
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English
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Linewidth metrology for x-ray masks with subhalfmicron feature size
(1987)
Mescheder, Ulrich
;
Mund, F.
;
Huber, H.-L.
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