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Author
Vizvary, Zsolt (1)
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Year of publication
2006
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Conference Proceeding
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English
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Keywords
Finite elements
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Membrane deflection
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Perforated silicon nitride
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Large Defection Analysis of Perforated Silicon Nitride Membranes
(2006)
Kovacs, Adam
;
Vizvary, Zsolt
;
Kovacs, Andras
;
Mescheder, Ulrich
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