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Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters
(2002)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2006)
Realization and mechanical investigation of perforated and porous membranes for filter applications
(2006)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2007)
Mechanical investigation of perforated and porous membranes for micro- and nanofilter applications
(2007)
Skalierbare Verbindungstechnik mittels anpassbarer nanoskaliger Verbindungsstrukturen (NanoBond)
(2009)
Transport mechanisms in nanostructured porous silicon layers for sensor and filter applications
(2012)
Oberflächenstabilisierung nanostrukturierter poröser Siliziumschichten für sensorische Anwendungen
(2012)