Refine
Year of publication
- 2021 (1) (remove)
Document type
Language
- English (1)
Has full text
- Yes (1) (remove)
Is part of the Bibliography
- Yes (1)
Keywords
- Laser ablation (1)
- Laser power intensity (1)
- Multiphoton ionisation (1)
- Silicon nitride (1)
- Ultrashort pulse laser (1)