Refine
Year of publication
- 2015 (18) (remove)
Document type
- Conference Proceeding (11)
- Report (4)
- Article (peer-reviewed) (2)
- Other (1)
Has full text
- No (18)
Is part of the Bibliography
- Yes (18)
Keywords
- CD-ROM (6)
- Silicon (2)
- Temperature measurement (2)
- 3D transformation (1)
- Anodization (1)
- Bird’s beak (1)
- Bonding (1)
- Convex and concave corner rounding (1)
- Electrochemical etching (1)
- Etch front movement (1)
- Force (1)
- Gas detectors (1)
- Locos (1)
- MOEMS (1)
- Microelectromechanical devices (1)
- Micropunching (1)
- Microsensors (1)
- Nanotechnology (1)
- Narrow band (1)
- Needles (1)
- Optical filters (1)
- Optical variables measurement (1)
- Patent (1)
- Photonic crystal (1)
- Photonic crystals (1)
- Porous silicon (1)
- Reflectivity (1)
- Scanning system (1)
- Silicon punch tool (1)
- Structuring (1)
- Substrates (1)
- Surface morphology (1)