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Author
Kovacs, Adam
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Kovacs, Andras
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Mescheder, Ulrich
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Year of publication
2008
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Article (peer-reviewed)
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English (1)
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Estimation of elasticity modulus and fracture strength of thin perforated SiN membranes with finite element simulations
(2008)
Kovacs, Adam
;
Kovacs, Andras
;
Mescheder, Ulrich
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to
1