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Author
Rentschler, Achim (1)
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Year of publication
2023
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Document type
Article (peer-reviewed)
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English (1)
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Keywords
Fluorocarbon
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HFC
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PCB
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Plasma etching
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Printed circuit board
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Novel method for plasma etching of printed circuit boards as alternative for fluorocarbon gases
(2023)
Kintzel, Wolfram
;
Schmid, Marvin
;
Rentschler, Achim
;
Eisenlohr, Jörg
;
Bucher, Volker
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