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Author
Mescheder, Ulrich (3)
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Year of publication
2003 (3)
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Article (peer-reviewed)
(1)
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English (3)
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Keywords
Effective heating
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Humidity sensor
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Porous silicon
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Porous Silicon: Technology and Applications for Micromachining and MEMS
(2003)
Mescheder, Ulrich
Porous silicon-based humidity sensor with interdigital electrodes and internal heaters
(2003)
Fürjes, P.
;
Kovacs, Andras
;
Dücsö, Cs.
;
Adam, Maria
;
Müller, Bernhard
;
Mescheder, Ulrich
Design Consideration and Realization of a Novel Micromechanical Bi-Stable Switch
(2003)
Freudenreich, Markus
;
Mescheder, Ulrich
;
Somogyi, Gergoe
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