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Author
Aljasem, Khaled (1)
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Year of publication
2021
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Document type
Article (peer-reviewed)
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Language
English
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Keywords
Active focusing
(1)
Adaptive optics
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Electrostatic actuation
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MOEMS
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SOI
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Evaluation and Optimization of a MOEMS Active Focusing Device
(2021)
Mescheder, Ulrich
;
Lootze, Michael
;
Aljasem, Khaled
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