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Author
Lyubimov, Victor V. (1)
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Year of publication
2016
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Article (peer-reviewed)
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Language
English
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Keywords
Metal coating
(1)
Micro electrochemical machining
(1)
Plastic electrode-tool
(1)
Silicon
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Investigation of plastic electrode tools for electrochemical machining of silicon
(2016)
Lyubimov, Victor V.
;
Volgin, Vladimir M.
;
Mescheder, Ulrich
;
Gnidina, Inna V.
;
Ivanov, Alexey
1
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