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Author
Lizeau, Ch. (1)
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Year of publication
2001
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Document type
Conference Proceeding
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English (1)
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Laser micromachining
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Wafer bonding
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Local Laser Bonding for Low Temperature Budget
(2001)
Mescheder, Ulrich
;
Alavi, M.
;
Hiltmann, K.
;
Lizeau, Ch.
;
Nachtigall, Christoph
;
Sandmaier, H.
1
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