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Author
Bauerdick, S. (1)
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Year of publication
2003
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Article (peer-reviewed) (1)
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English
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Keywords
Atomic force microscope
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Electron beam induced deposition
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In-situ monitoring
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Local gas injection
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Micro manipulator
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In-situ monitoring of electron beam induced deposition by atomic force microscopy in a scanning electron microscope
(2003)
Bauerdick, S.
;
Burkhardt, Claus J.
;
Rudorf, R.
;
Barth, W.
;
Bucher, Volker
;
Nisch, Wilfried
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