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Author
Ukhov, A. A. (1)
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Year of publication
1996
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Conference Proceeding
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English (1)
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Photometric device for control of micromechanical elements manufacturing
(1996)
Kolgin, E. A.
;
Tumanov, I. A.
;
Ukhov, A. A.
;
Mescheder, Ulrich
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