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Transport mechanisms in nanostructured porous silicon layers for sensor and filter applications
(2012)
The charge response of a force applied to piezoelectric stack actuators was characterized in the range of 0 N – 20 N for application in piezoelectric self-sensing. Results show linear behavior between ap-plied force and collected charge for both actuators tested in this study. One actuator exhibits a 3.55 times higher sensitivity slope than the other related to its larger capacitance. An error analysis reveals a reduction of relative error in charge measurement with rising forces applied to the actuators.
Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters
(2002)
Semi-rigid ring-shaped electrode dielectric electroactive polymer membrane as buckling actuator
(2019)
Realization and mechanical investigation of perforated and porous membranes for filter applications
(2006)
Real time In-Situ Quality Monitoring of Grinding Process using Microtechnology based Sensor Fusion
(2020)
Primary Current Distribution Model for Electrochemical Etching of Silicon Through a Circular Opening
(2015)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2006)
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2007)
Optimization of Microfabricated 2D Planar Spiral Microcoils for the Micro NDT of Grinding Burn
(2020)
Movement giver
(2001)
Micromechanical inclinometer
(1997)
Mechanical investigation of perforated and porous membranes for micro- and nanofilter applications
(2007)
Influence of current density on the adhesion of seedless electrodeposited copper layers on silicon
(2019)
The influence of bath hydrodynamics on the resultant micromechanical properties of electrodeposited nickel-cobalt alloy system is investigated. The bath hydrodynamics realized by magnetic stirring is simulated using COMSOL Multiphysics and a region of minimum variation in velocity within the electrolytic cell is determined and validated experimentally. Nickel-cobalt alloy and nickel coating samples are deposited galvanostatically (50 mA/cm2) with varying bath velocity (0 to 42 cm/s). The surface morphology of samples gradually changed from granular (fractal dimension 2.97) to more planar (fractal dimension 2.15) growth type, and the according average roughness decreased from 207.5 nm to 11 nm on increasing the electrolyte velocity from 0 to 42 cm/s for nickel-cobalt alloys; a similar trend was also found in the case of nickel coatings. The calculated grain size from the X-ray diffractograms decreased from 31 nm to 12 nm and from 69 nm to 26 nm as function of increasing velocity (up to 42 cm/s) for nickel-cobalt and nickel coatings, respectively. Consecutively, the measured Vickers microhardness values increased by 43% (i.e., from 393 HV0.01 to 692 HV0.01) and by 33% (i.e., from 255 HV0.01 to 381 HV0.01) for nickel-cobalt and nickel coatings, respectively, which fits well with the Hall–Petch relation.
Microfabricated 2D inductive eddy-current transducers operating in a reflection differential transmitter-receiver mode are presented for the micro nondestructive detection of micro grinding burn. 2D spiral circular microcoils are employed as excitation coils, while an innovatively conceptualized “interconnected split-D” type differential microcoil is used as a sensing coil. Finite element modelling using COMSOL revealed the efficacy of proposed concept in non-destructive testing of small grinding burn having a width of 100 µm. The induced sensing coil voltage changed as a function of presence of grinding burn, with successful recording of the signal for the investigated lift-off range of 250 µm - 1000 µm for 100 kHz to 1 MHz driving frequencies of excitation coil. Experimental validation showed a 94% increase in the induced voltage of the sensing coil in presence of grinding burn on increasing the driving frequency of excitation coil from 100 kHz to 1 MHz. Thereby, revealing the superficial nature of the grinding burn defect, and showing the efficacy of the proposed concept for the non-destructive testing of grinding burn.