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Author
Müller, Bernhard (5)
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2013 (5)
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Conference Proceeding
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Report
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German
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Developement of stress relief suspensions for micro-machined silicon membranes
(2013)
Kronast, Wolfgang
;
Mescheder, Ulrich
;
Müller, Bernhard
Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology
(2013)
Kronast, Wolfgang
;
Mescheder, Ulrich
;
Müller, Bernhard
;
Huster, Rolf
Energy Harvesting: Silizium-Chip zum Ernten von Energie aus Vibration
(2013)
Mescheder, Ulrich
;
Müller, Bernhard
;
Nimo, Antwi
;
Abou Elkeir, Awad S.
Entwicklung einer Stressausgleichsstruktur für spannungsarme aktive Membranspiegel in SOI Technologie
(2013)
Kronast, Wolfgang
;
Mescheder, Ulrich
;
Müller, Bernhard
;
Huster, Rolf
Preiswerter und robuster Harvester für Vibrationsenergie
(2013)
Mescheder, Ulrich
;
Gu, Qingyun
;
Müller, Bernhard
1
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5