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Author
Mescheder, Ulrich
(2)
Ivanov, Alexey
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Keshavarzi, Shervin
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Reinecke, Holger
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2015 (2)
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Conference Proceeding
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Primary Current Distribution Model for Electrochemical Etching of Silicon Through a Circular Opening
(2015)
Ivanov, Alexey
;
Mescheder, Ulrich
Bonding Mechanism in the Velcro Concept Si-Si Low Temperature Direct Bonding Technique
(2015)
Keshavarzi, Shervin
;
Mescheder, Ulrich
;
Reinecke, Holger
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