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Author
Ivanov, Alexey
(1)
Kovacs, Andras
(1)
Mescheder, Ulrich
(1)
Year of publication
2016
(1)
Document type
Contribution to a Periodical
(1)
Language
English
(1)
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Local backside contacts (1)
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Application of local backside contacts for structuring Of silicon with anodization: simulation and experiments
(2016)
Ivanov, Alexey
;
Kovacs, Andras
;
Mescheder, Ulrich
1
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1