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Keshavarzi, Shervin (1)
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2016 (1)
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Article (peer-reviewed)
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English
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Direct bonding
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Porous silicon
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Velcro principle
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van der Waals force
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Room Temperature Si–Si Direct Bonding Technique Using Velcro-Like Surfaces
(2016)
Keshavarzi, Shervin
;
Mescheder, Ulrich
;
Reinecke, Holger
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