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Author
Mescheder, Ulrich (5)
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2003
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2016
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2017
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Part of a Book (5)
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English
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Energy
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Membranes
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Microelectronics
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Optoelectronics
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Mikrosystemtechnische Geruchssensorik und ihre Anwendungen in AAL
(2017)
Benyoucef, Dirk
;
Kallfaß, Vera
;
Kovacs, Andras
;
Mescheder, Ulrich
;
Palzer, Stefan
Modern Silicon-based MEMS Technology
(2003)
Mescheder, Ulrich
Porous Silicon: Technology and Applications for Micromachining and MEMS
(2003)
Mescheder, Ulrich
PSi-based Diffusion Membranes
(2016)
Kovacs, Andras
;
Mescheder, Ulrich
Surface Micromachining (Sacrificial Layer) and Its Applications in Electronic Devices
(2016)
Ivanov, Alexey
;
Mescheder, Ulrich
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