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Author
Müller, Bernhard (8)
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Year of publication
2007
(2)
2006
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2008
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2010
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2011
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2013
(1)
2015
(1)
Document type
Conference Proceeding (8)
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English (8)
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Is part of the Bibliography
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Keywords
Charge decay
(1)
Charge stability
(1)
Electrets charging
(1)
Electrostatic vibration energy harvester
(1)
Ion implantation
(1)
SiO2 film electrets
(1)
Vibration energy harvesting
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MEMS-Based Air Quality Sensor
(2007)
Mescheder, Ulrich
;
Bauersfeld, Marie-Luise
;
Kovacs, Andras
;
Kritwattanakhorn, Jutaphorn
;
Müller, Bernhard
;
Peter, Andreas
;
Ament, Christoph
;
Rademacher, Sven
;
Wöllenstein, Jürgen
Sensor system for air quality measurement
(2007)
Kovacs, Andras
;
Müller, Bernhard
;
Kritwattanakhorn, Jutaphorn
;
Mescheder, Ulrich
;
Peter, Andreas
;
Ament, Christoph
;
Wöllenstein, Jürgen
;
Bauersfeld, Marie-Luise
;
Rademacher, Sven
Charging of SiO2 Electret Film by Ion Implantation for MEMS Based Energy Harvesting Systems
(2008)
Mescheder, Ulrich
;
Urbanovic, P.
;
Müller, Bernhard
;
Baborie, Safi
High eficient, low cost electret charging set-up for mems based energy harvesting systems
(2010)
Saad, Awad
;
Mescheder, Ulrich
;
Müller, Bernhard
;
Nimo, Antwi
3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls
(2011)
Nimo, Antwi
;
Mescheder, Ulrich
;
Müller, Bernhard
;
Abou Elkeir, Awad S.
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2006)
Kritwattanakhorn, Jutaphorn
;
Kovacs, Andras
;
Mescheder, Ulrich
;
Müller, Bernhard
;
Bauersfeld, Marie-Luise
;
Rademacher, Sven
;
Wöllenstein, Jürgen
Development of a focusing micromirror device with an in-plane stress relief structure in SOI technology
(2013)
Kronast, Wolfgang
;
Mescheder, Ulrich
;
Müller, Bernhard
;
Huster, Rolf
Simulation, Fabrication and Characterization of Robust Vibrational Energy Harvester
(2015)
Chauhan, Surjitsinh
;
Müller, Bernhard
;
Mescheder, Ulrich
1
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8