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Author
Ivanov, Alexey (2)
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2015
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2016
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English (2)
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Primary Current Distribution Model for Electrochemical Etching of Silicon Through a Circular Opening
(2015)
Ivanov, Alexey
;
Mescheder, Ulrich
Investigation of plastic electrode tools for electrochemical machining of silicon
(2016)
Lyubimov, Victor V.
;
Volgin, Vladimir M.
;
Mescheder, Ulrich
;
Gnidina, Inna V.
;
Ivanov, Alexey
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