Deutsch
Login
Open Access
Home
Search
Browse
Publish
FAQ
Volltext-Downloads (blau) und Frontdoor-Views (grau)
Schließen
Refine
Author
Mescheder, Ulrich (5)
(remove)
Year of publication
2009 (5)
(remove)
Document type
Article (peer-reviewed)
(2)
Conference Proceeding
(2)
Report
(1)
Language
English (5)
(remove)
Has full text
No
(5)
Is part of the Bibliography
Yes
(5)
Keywords
CD-ROM
(1)
5
search hits
1
to
5
Export
BibTeX
CSV
RIS
10
10
20
50
100
Sort by
Year
Year
Title
Title
Author
Author
Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems
(2009)
Mescheder, Ulrich
;
Müller, Bernhard
;
Baborie, Safi
;
Urbanovic, P.
Investigation of humidity adsorption in porous silicon layers
(2009)
Kovacs, Andras
;
Meister, Dirk
;
Mescheder, Ulrich
Characterization of porous silicon based optical sensor system for biosensor applications
(2009)
Kovacs, Andras
;
Jonnalagadda, Prasad
;
Meng, X.
;
Mescheder, Ulrich
Formation of arbitrarily shaped 3D-forms in silicon by electrochemical wet-etching
(2009)
Ivanov, Alexey
;
Mescheder, Ulrich
;
Woias, Peter
;
Kröner, Michael
Optimisation of Surface Quality of 3D Silicon Master Forms for Injection Molding of Optical Micro Elements
(2009)
Ivanov, Alexey
;
Kovacs, Andras
;
Mescheder, Ulrich
;
Kuhn, S.
;
Kübler, M.
;
Burr, A.
1
to
5