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Author
Mescheder, Ulrich
(5)
Mackens, U.
(3)
Lüthje, H.
(2)
Mund, F.
(2)
Oppenländer, Thomas
(2)
Canada, Francisco J.
(1)
Deigner, Hans-Peter
(1)
Ehrlich, Ch.
(1)
Frei, Bruno
(1)
Gergeleit, M.
(1)
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Year of publication
1989 (10)
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Article (peer-reviewed)
(6)
Conference Proceeding
(3)
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(1)
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English
(6)
German
(4)
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Title
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State of the art of pattern placement accuracy of silicon X-ray master masks
(1989)
Pongratz, S.
;
Mescheder, Ulrich
;
Ehrlich, Ch.
;
Huber, H.-L.
;
Kohlmann, K.
;
Windbracke, W.
Synthesis, Reactivity, and Application as Chiral Auxiliaries of the novel (3R)- and (3S)-4,5-dihydro-3-hydroxy-4,4,5,5-tetramethyl-3-phenylfuran-2(3H)-ones in the Paterno-Büchi reaction
(1989)
Oppenländer, Thomas
;
Schönholzer, Peter
Submikrometer Linienbreitenmetrologie hoher Genauigkeit
(1989)
Mescheder, Ulrich
;
Werner, K.
Investigation Of Linewidth Uniformity In X-Ray Lithography
(1989)
Mescheder, Ulrich
;
Mackens, U.
;
Mund, F.
Fabrication of 0.5 μm NMOS-devices by all level X-ray lithography
(1989)
Mackens, U.
;
Mescheder, Ulrich
;
Mund, F.
;
Lüthje, H.
;
Lifka, H.
;
Juffermans, C.A.H.
;
Woerlee, P.H.
;
Walker, A.J.
Röntgenstrahllithographie: Herstellung einer 0.5 μm Schaltung und Overlayuntersuchungen
(1989)
Mackens, U.
;
Mescheder, Ulrich
;
Lüthje, H.
Analysis of Urinary Stones by Computerized Infrared Spectroscopy
(1989)
Hesse, A.
;
Gergeleit, M.
;
Schüller, P.
;
Möller, Knut
Ein neuer, axial fördernder Rührer zum Dispergieren von Gas in Flüssigkeiten
(1989)
Hass, Volker C.
;
Nienow, Alvin W.
EPA European Photochemistry Association: Summer School on Photochemistry, Spiez, Switzerland, July 30 - August 5, 1989
(1989)
Frei, Bruno
;
Oppenländer, Thomas
Membranes as the energy source in the endergonic transformation of vitamin A to 11-cis-retinols
(1989)
Deigner, Hans-Peter
;
Law, Wing C.
;
Canada, Francisco J.
;
Rando, Robert R.
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