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Author
Müller, Bernhard (15)
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2007
(3)
2011
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2002
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2003
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2006
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2008
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2009
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Conference Proceeding
(8)
Article (peer-reviewed)
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Language
English (15)
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(15)
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(15)
Keywords
Porous silicon
(2)
Adhesion and diffusion barrier
(1)
Charge decay
(1)
Charge stability
(1)
Effective heating
(1)
Electrets charging
(1)
Electrochemical etching process
(1)
Electrostatic vibration energy harvester
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Humidity sensor
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Ion implantation
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Author
Sensorik: Porous Silicon Based Humidity Sensor with Interdigital Electrodes and Internal Heaters
(2002)
Mescheder, Ulrich
;
Kovacs, Andras
;
Müller, Bernhard
Porous silicon-based humidity sensor with interdigital electrodes and internal heaters
(2003)
Fürjes, P.
;
Kovacs, Andras
;
Dücsö, Cs.
;
Adam, Maria
;
Müller, Bernhard
;
Mescheder, Ulrich
Optimization of platinum adhesion in electrochemical etching process for multi-sensor systems
(2007)
Kritwattanakhorn, Jutaphorn
;
Bauersfeld, Marie-Luise
;
Kovacs, Andras
;
Müller, Bernhard
;
Mescheder, Ulrich
;
Rademacher, Sven
;
Wöllenstein, Jürgen
MEMS-Based Air Quality Sensor
(2007)
Mescheder, Ulrich
;
Bauersfeld, Marie-Luise
;
Kovacs, Andras
;
Kritwattanakhorn, Jutaphorn
;
Müller, Bernhard
;
Peter, Andreas
;
Ament, Christoph
;
Rademacher, Sven
;
Wöllenstein, Jürgen
Sensor system for air quality measurement
(2007)
Kovacs, Andras
;
Müller, Bernhard
;
Kritwattanakhorn, Jutaphorn
;
Mescheder, Ulrich
;
Peter, Andreas
;
Ament, Christoph
;
Wöllenstein, Jürgen
;
Bauersfeld, Marie-Luise
;
Rademacher, Sven
Charging of SiO2 Electret Film by Ion Implantation for MEMS Based Energy Harvesting Systems
(2008)
Mescheder, Ulrich
;
Urbanovic, P.
;
Müller, Bernhard
;
Baborie, Safi
Properties of SiO2 electret films charged by ion implantation for MEMS-based energy harvesting systems
(2009)
Mescheder, Ulrich
;
Müller, Bernhard
;
Baborie, Safi
;
Urbanovic, P.
High eficient, low cost electret charging set-up for mems based energy harvesting systems
(2010)
Saad, Awad
;
Mescheder, Ulrich
;
Müller, Bernhard
;
Nimo, Antwi
A device for 3D energy harvesting
(2011)
Nimo, Antwi
;
Mescheder, Ulrich
;
Müller, Bernhard
;
Abou Elkeir, Awad S.
3D capacitive vibrational micro harvester using isotropic charging of electrets deposited on vertical sidewalls
(2011)
Nimo, Antwi
;
Mescheder, Ulrich
;
Müller, Bernhard
;
Abou Elkeir, Awad S.
1
to
10