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Author
Ivanov, Alexey (2)
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2009 (2)
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Conference Proceeding
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English
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Formation of arbitrarily shaped 3D-forms in silicon by electrochemical wet-etching
(2009)
Ivanov, Alexey
;
Mescheder, Ulrich
;
Woias, Peter
;
Kröner, Michael
Optimisation of Surface Quality of 3D Silicon Master Forms for Injection Molding of Optical Micro Elements
(2009)
Ivanov, Alexey
;
Kovacs, Andras
;
Mescheder, Ulrich
;
Kuhn, S.
;
Kübler, M.
;
Burr, A.
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