Refine
Year of publication
Document type
- Conference Proceeding (89)
- Article (peer-reviewed) (48)
- Contribution to a Periodical (5)
- Part of a Book (3)
- Other (2)
- Report (2)
Language
- English (149) (remove)
Has full text
- No (149) (remove)
Is part of the Bibliography
- Yes (149)
Keywords
- Porous silicon (13)
- Poster (11)
- CD-ROM (7)
- Silicon (5)
- MOEMS (4)
- FEM simulation (3)
- MEMS (3)
- Needles (3)
- Temperature measurement (3)
- Bonding (2)